发明名称 |
Scanning probe microscope |
摘要 |
<p>There is disclosed a scanning probe microscope capable of producing a topographic image at a high resolution with a cantilever of a large spring constant and, at the same time, a surface potential image at a high resolution. This microscope can take the form of an atomic force microscope that detects the surface potential of a sample, using a force gradient acting between the probe tip and a sample. The gradient is represented by the output from a frequency-to-voltage converter. <IMAGE></p> |
申请公布号 |
EP0890820(B1) |
申请公布日期 |
2004.03.24 |
申请号 |
EP19980305412 |
申请日期 |
1998.07.08 |
申请人 |
JEOL LTD. |
发明人 |
KITAMURA, SHINICHI;SUEYOSHI, TAKASHI |
分类号 |
G01B7/34;G01B7/00;G01N27/00;G01N37/00;G01Q60/24;G01Q60/30;G01Q60/32;(IPC1-7):G01B7/34;G01N27/22 |
主分类号 |
G01B7/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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