| 摘要 |
PURPOSE: An electrostatic type micro electrode and a method for manufacturing the same are provided to reduce the size and the weight of a system while improving responsive speed of the system. CONSTITUTION: An electrostatic type micro electrode includes a first electrode(10) having plural first fingers(11), a second electrode(21) having plural second fingers(21), which are alternately aligned with regard to the first fingers(11), and a third electrode(30) having plural third fingers(31) formed at a lower portion of the second fingers(21). The third electrode(30) is aligned at a lower portion of the second electrode(20) by interposing an insulation layer(40). The first electrode(10) has a damping element for reducing fluctuation of the first electrode(10). The second and third electrodes(20,30) are connected to a fixed structure.
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