Substrate transporting and processing system,申请号EP19980300405-传众专利搜索

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发明名称	Substrate transporting and processing system
摘要
申请公布号	EP0854499(B1)	申请公布日期	2004.03.24
申请号	EP19980300405	申请日期	1998.01.20
申请人	TOKYO ELECTRON LIMITED	发明人	KANEKO, SATOSHI;KAMIKAWA, YUJI;KOGUCHI, AKIRA;KURODA, OSAMU;KITAHARA, SHIGENORI;NISHIDA, TATSUYA
分类号	H01L21/00;H01L21/677;(IPC1-7):H01L21/00	主分类号	H01L21/00
代理机构		代理人
主权项
地址

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