发明名称 |
Microelement piezoelectric feedback type picking and releasing device |
摘要 |
A microelement piezoelectric feedback type picking and releasing device is constructed to include a piezoelectric material, an IDT (interdigital transducer) electrode plated and a progressive electrode plated on the piezoelectric material, the progressive electrode having a plurality of electrode elements of different sizes arranged in proper order in one direction, the IDT electrode forming a releasing unit by means of surface acoustic wave/ultrasonic wave and serving as a voltage signal feedback sensor for clamping force control.
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申请公布号 |
US6710512(B2) |
申请公布日期 |
2004.03.23 |
申请号 |
US20020175841 |
申请日期 |
2002.06.21 |
申请人 |
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE |
发明人 |
TSAI HUNG-YIN;CHENG CHIH-YUNG;LIU PING-YIN |
分类号 |
B25J7/00;B81B7/00;H01L41/113;H03H9/25;(IPC1-7):H01I41/08 |
主分类号 |
B25J7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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