发明名称 System for detecting rotation angles of an diffracting portion using a absorption cell sealed with a plurality of kinds of gases and linear interpolation
摘要 A diffracting portion is composed of optical elements including an optical element, and diffracts light. A drive unit rotates the optical element. An angle detector detects a rotation angle of the optical element. A reference wavelength light source includes a light source and an absorption cell sealed with a plurality of gasses of different kinds having mutually different absorption line wavelengths, and emits the reference light of a specific wavelength depended on the absorption cell toward the diffracting portion. A reference photodetector converts a diffracted light from the diffracting portion into an electric signal. A signal processor receives a rotation angle issued by the angle detector when detecting a predetermined value of the electric signal, and determines the predetermined rotation angle corresponding to the specific wavelength determined depending on the plurality of gases.
申请公布号 US6710332(B2) 申请公布日期 2004.03.23
申请号 US20020131516 申请日期 2002.04.23
申请人 ANRITSU CORPORATION 发明人 JOUKAWA HIDEYA;KAKIMOTO TATSUKI
分类号 G01B11/26;G01D5/347;G01J3/18;G02B5/18;(IPC1-7):H01J3/14 主分类号 G01B11/26
代理机构 代理人
主权项
地址