发明名称 |
System for detecting rotation angles of an diffracting portion using a absorption cell sealed with a plurality of kinds of gases and linear interpolation |
摘要 |
A diffracting portion is composed of optical elements including an optical element, and diffracts light. A drive unit rotates the optical element. An angle detector detects a rotation angle of the optical element. A reference wavelength light source includes a light source and an absorption cell sealed with a plurality of gasses of different kinds having mutually different absorption line wavelengths, and emits the reference light of a specific wavelength depended on the absorption cell toward the diffracting portion. A reference photodetector converts a diffracted light from the diffracting portion into an electric signal. A signal processor receives a rotation angle issued by the angle detector when detecting a predetermined value of the electric signal, and determines the predetermined rotation angle corresponding to the specific wavelength determined depending on the plurality of gases.
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申请公布号 |
US6710332(B2) |
申请公布日期 |
2004.03.23 |
申请号 |
US20020131516 |
申请日期 |
2002.04.23 |
申请人 |
ANRITSU CORPORATION |
发明人 |
JOUKAWA HIDEYA;KAKIMOTO TATSUKI |
分类号 |
G01B11/26;G01D5/347;G01J3/18;G02B5/18;(IPC1-7):H01J3/14 |
主分类号 |
G01B11/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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