| 摘要 |
Methods of forming a nozzle plate for a substrate with an ink ejection element include forming first and second negative photoresist layers, each with a different degradation temperature, directly on the substrate in accordance with a desired nozzle plate pattern. Upon heating the layers at a temperature greater than or at least as great as one of degradation temperatures and lower than the other, the negative photoresist layer with the lower degradation temperature breaks down while the other negative photoresist layer suffers nothing and remains intact. Thereafter, the degraded negative photoresist is completely removed with a simple solvent development step and the nozzle plate is formed. Preferred arrangements of negative photoresist materials include a first layer located adjacent the ink ejection element and a second layer on both the substrate and the first layer at locations other than above the ink ejection element.
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