发明名称 |
Temperature control simulation method and apparatus |
摘要 |
A temperature control simulation method and apparatus for forming a temperature system simulation model on a computer, provide substantially the same response or simulation characteristics as a temperature change in an actual furnace, whereby a temperature control algorithm can be developed and the method or manner of manipulating the temperature control can be learned without using an actual furnace. A transfer function is determined which represents a relationship between a heater input and a temperature output. A temperature control simulation for a heating furnace is executed using the transfer function of a heating furnace as a transfer function that a temperature system simulation device uses. |
申请公布号 |
US6711531(B1) |
申请公布日期 |
2004.03.23 |
申请号 |
US19990369926 |
申请日期 |
1999.08.09 |
申请人 |
KOKUSAI ELECTRIC CO., LTD. |
发明人 |
TANAKA KAZUO;YAMAGUCHI HIDETO;URABE KENZO |
分类号 |
H01L21/22;G05D23/00;G05D23/19;G06F17/00;G06F19/00;G06G7/48;G06G7/66;G06Q50/00;G06Q50/04;H01L21/00;(IPC1-7):G06G7/48 |
主分类号 |
H01L21/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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