发明名称 |
Substrate holding apparatus and exposure apparatus including substrate holding apparatus |
摘要 |
A substrate holding apparatus which holds a flat-like substrate comprises a base member and a plurality of projecting support members disposed on the base member such that the supporting members are arranged like a triangular lattice and distal end portions thereof are positioned on substantially the same plane. The substrate is to be placed on the plurality of support members.
|
申请公布号 |
US6710857(B2) |
申请公布日期 |
2004.03.23 |
申请号 |
US20010803920 |
申请日期 |
2001.03.13 |
申请人 |
NIKON CORPORATION |
发明人 |
KONDO MAKOTO |
分类号 |
H01L21/683;G03F7/20;H01L21/027;(IPC1-7):G03B27/58;G03B27/62 |
主分类号 |
H01L21/683 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|