| 摘要 |
PURPOSE: An aluminum oxide catalyst for removing the perfluoro compounds by decomposing perfluoro compounds that is a global warming gas generated from semiconductor manufacturing industries is provided, and a method for decomposing thus removing perfluoro compounds in waste gas using the catalyst is provided. CONSTITUTION: The aluminum oxide catalyst for decomposing thus removing perfluoro compounds in waste gas is characterized in that phosphorus constituent is supported onto the surface of aluminum oxide in such a way that a mole ratio of aluminum (Al)/phosphorus (P) is 10 to 100, wherein the aluminum oxide is selected from gamma alumina (γ-Al2O3), aluminum trihydroxide, boehmite and pseudo-boehmite, wherein the phosphorus constituent is diammonium hydrophosphate ((NH3)2HPO4), ammonium dihydrophosphate (NH3H2PO4) or phosphoric acid (H3PO4), and wherein the perfluoro compounds are one or more compounds selected from CF4, CHF3, CH2F2, C2F4, C2F6, C3F6, C3F8, C4F8, C4F10, NF3 and SF6. The method for decomposing thus removing perfluoro compounds in waste gas comprises the process of passing waste gas containing perfluoro compounds through the aluminum oxide catalyst at a temperature of 400 to 800 deg.C under the existence of steam, wherein the steam contains the perfluoro compounds in such a way that a mole ratio of steam/perfluoro compounds is in the range of 1 to 100, and where oxygen along with the steam is added to the catalyst in the concentration range of 0 to 50%.
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