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发明名称
摘要
申请公布号
JP3508566(B2)
申请公布日期
2004.03.22
申请号
JP19980259881
申请日期
1998.09.14
申请人
发明人
分类号
C23C16/18;C23C16/44;C23C16/448;C23C16/50;C23C16/505;(IPC1-7):C23C16/448
主分类号
C23C16/18
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代理人
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