| 摘要 |
PURPOSE: A plating apparatus having electrode ring is provided to form a plating film having a uniformed thickness by adhering the electrode ring to the upper end of a plating tank so that an electric field is uniformly distributed on the surface of wafers during electroplating. CONSTITUTION: The plating apparatus comprises a plating tank; a plural first polarity contact point rods and a second polarity contact point rod formed on the plating tank; a loop shaped electrode ring(200) which is connected to the plural first polarity contact point rods, and on the inner surface of which a plurality of stepped projections(220) are formed so that the bodies to be plated are rested on the stepped projections with the circumference of the edge of various bodies to be plated having different size being contacted with the plurality of stepped projections(220), wherein the plating apparatus further comprises a metal box arranged at the lower part of the electrode ring to be connected to the second polarity contact point rod; and a sprayer arranged at the lower part of the metal box to spray a plating solution, wherein the plating tank comprises first plating tank on which the electrode ring and metal box are mounted, and second plating tank on which the sprayer is mounted, the first and second plating tanks are separately connected to each other, wherein the plating apparatus further comprises a plating tank of which outer wall covers the plating tank, and the upper part of which is opened, and a lid installed to open or close an opening part of the plating tank outer wall, wherein a power supply terminal connected to the first and second polarity contact point rods is installed on the lower surface of the lid, wherein the residual surface of the electrode ring is coated with a chemical resistant coating material(210) except a surface on which the bodies to be plated are rested and supported and a part of the electrode ring which comes in contact with the first polarity contact point rods, and wherein the coating material(210) is Teflon or polyethylene.
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