| 摘要 |
FIELD: electrical engineering. ^ SUBSTANCE: maximum flow rate of each component in process and facility to prepare and supply multicomponent working gas into discharge space of gaseous-discharge device is limited in advance right in conduits feeding components with the help of restricting members, for instance, nozzles with selection of their hydraulic resistances in correspondence with proportion of components in mix of working gas. Later flow of mixture into discharge space is metered or shut off by reduced flow rate of all components by means of single metering member. ^ EFFECT: excluded possibility of uncontrolled mixing of components, achieved high purity of generated gases and practically explosion-proof operation. ^ 4 cl, 1 dwg |
