METHOD OF CONTROLLING DEFLECTION AMPLITUDE AND OFFSET OF RESONANT SCANNING MIRROR USING PHOTO DETECTOR TIMING

摘要

PURPOSE: Provided are a system and a method for controlling the deflection amplitude and offset of a laser beam that is deflected off of a vibrating mirror galvanometer, given only beam deflection timing information. CONSTITUTION: Two photo detectors(10,12) are formed near both ends of the deflection range associated with a resonant scanning mirror(14) that is deflecting a laser beam(16). A method of controlling a resonant scanning mirror comprises the steps of: measuring deflection timing associated with a laser beam deflected off the resonant scanning mirror in response to movement of the resonant scanning mirror; and controlling the deflection amplitude and offset of the laser beam in response to deflection timing measurements.