| 摘要 |
FIELD: measuring equipment. ^ SUBSTANCE: scanning probing microscope has base, probe, piezoscanner, object holder with object, block for moving probe to object, detachable analysis block with first mirror mounted on it, optically mated with object, as well as optical observation system in form of optical microscope with optical axis perpendicular to object surface, and second slanting mirror optically mated to first mirror and optical microscope axis, analysis block with first mirror and second slanting mirror are placed on base, base being made with possible mounting of replaceable analysis blocks of various types, block for moving probe to object is made with possible mounting of replaceable object holders and replaceable piezoscanners with object holders, second slanting mirror has at least two fixed positions for combining optical axis of microscope to object, and optical microscope is mounted on rotating vertical bar and has at least three fixed positions: one along probe axis and two on optical axis of combination of second slanting mirror. ^ EFFECT: higher efficiency. ^ 2 cl, 3 dwg |
