| 摘要 |
PURPOSE: A gate valve is provided to prevent foreign materials from entering the inside of a processing chamber and to make an arm drive device and an arm with simplified structure and small size. CONSTITUTION: A gate valve comprises a valve housing(1) having the inner space, and first and second openings(2) facing each other; a valve seat(4) arranged in the inner space around the edge of the first opening; a valve disk(5) sealing up the first opening while engaging with the valve seat, in moving to a closed position; a pivot arm(6) having a base part fixed to the valve housing by a main shaft; an arm drive device(8) moving the end of the pivot arm between a first position where the valve disk is at a completely opened position and a second position where the valve disk is at a completely closed position; and a power transmission device(9) transmitting the movement of the pivot arm to the valve disk. The power transmission device includes first roller guide grooves formed to the valve disk; valve disk support units fixed to the end of the pivot arm by the main shaft; second roller guide grooves formed to the valve disk support units; third roller guide grooves formed to the valve disk support units; support plates; fourth roller guide grooves formed to the support plate; first rollers engaging with the first and second roller guide grooves; and second rollers engaging with the third and fourth roller guide grooves. The first and second roller guide grooves are each extended downward obliquely to be separated from the valve disk. The third and fourth roller guide grooves are each extended downward obliquely to approach the valve disk.
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