发明名称 |
INSPECTION CONDITION DATA MANAGEMENT METHOD, SYSTEM, PROGRAM, AND INSPECTION DEVICE |
摘要 |
<p>An inspection condition data management method includes steps of: receiving an input of type name from an input section; referencing the type name received from the input section and a table defining a similarity between the types, so as to search a type similar to the type in a storage section containing inspection condition data; recognizing the inspection step containing the inspection condition data on the similar type in the storage section; editing/outputting the similar type picked up from the searched similar type group in proportion to the number of inspection steps and receiving the similar type selection for each inspection step from the input section; and extracting from the storage section, inspection condition data on the similar type inspection step which has received the selection for each inspection step and using this inspection condition data to create inspection condition data on the type received from the input section.</p> |
申请公布号 |
AU2003257548(A1) |
申请公布日期 |
2004.03.19 |
申请号 |
AU20030257548 |
申请日期 |
2003.08.26 |
申请人 |
HITACHI, LTD. |
发明人 |
YOHEI ASAKAWA;MAKOTO ONO;DAISUKE FUJIKI |
分类号 |
G01N21/956;G05B19/418;H01L21/02;H01L21/66;(IPC1-7):H01L21/02 |
主分类号 |
G01N21/956 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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