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发明名称
METHOD FOR ENDPOINT DETECTION DURING ETCH
摘要
申请公布号
AU2003252080(A1)
申请公布日期
2004.03.19
申请号
AU20030252080
申请日期
2003.07.16
申请人
ADVANCED MICRO DEVICES, INC.
发明人
KAY HELLIG;MASSUD AMINPUR
分类号
H01L21/311;(IPC1-7):H01L21/66
主分类号
H01L21/311
代理机构
代理人
主权项
地址
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