| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitance-type acceleration sensor which is effectively reduced in size by lowering the height of the sensor, while assuring detecting sensitivity, and to provide a method for manufacturing the same. SOLUTION: A weight 50 is formed into a mushroom shape, integrated with a shaft part 52 passed through a central hole 31 of the upper side electrode substrate 30 and is fixed to a diaphragm 10 and with a diameter head part 51 larger than the diameter of the hole 31 and arranged on the outer surface side of the upper side electrode substrate 30. After the upper and lower substrates 30 and 40 are laminated on both sides of the diaphragm 10 via the spacer 20, the shaft part 52 of the weight 50 is passed through the hole 31 of the substrate 30, and is welded to the diaphragm. 10. COPYRIGHT: (C)2004,JPO
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