FILM FORMING APPARATUS, LIQUEFIED MATERIAL FILLING METHOD, DEVICE, AND METHOD AND APPARATUS FOR MANUFACTURING DEVICE

摘要

PROBLEM TO BE SOLVED: To fill an ink in a head without heating nor leaving air bubbles in a flow path even with the ink of high viscosity.

SOLUTION: A head 14 is provided with a discharge nozzle. A sucking apparatus 44 sucks a liquefied material in the head 14 from the discharge nozzle through a suction path. By intermittently sucking the liquefied material from the discharge nozzle, it is filled in the head 14.

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