AUTOMATIC IMPEDANCE MATCHING APPARATUS

摘要

PROBLEM TO BE SOLVED: To solve the problem that the impedance of a load discontinuously fluctuates and consequently a matching point is not reached in a process of matching operations in an automatic impedance matching apparatus in which an impedance matching circuit is inserted between a high frequency power source and the load to match the impedance. SOLUTION: The operating positions x and y of the adjusting parts of variable impedance elements Cx and Cy are controlled to follow an adjustment track 8 of the plurality of operating positions x and y preset to avoid an area 10 wherein the impedance of the load discontinuously fluctuates. When the operating positions approaches the matching point while avoiding the area 10, the matching operation is performed similarly to the prior art. COPYRIGHT: (C)2004,JPO