| 摘要 |
PROBLEM TO BE SOLVED: To improve productivity and enhance reliability or the like of a manufactured inkjet head by preventing diaphragm defects caused by an etching liquid and making a surface of a thinned Si cavity substrate as flat as possible, and to provide a recorder using the inkjet head. SOLUTION: In the manufacturing method for the inkjet head which has an ink jetting chamber 5, a nozzle hole 16 and an ink supply port 17 which communicate with the jetting chamber 5, the diaphragm 4 formed to a lower face of the jetting chamber 5, and an electrode 12 opposed via a gap to the diaphragm 4, and which jets ink drops from the nozzle hole 16 by impressing a voltage between the diaphragm 4 and the electrode 12 and deforming the diaphragm 4, a first substrate 1 which is to constitute the diaphragm 4 and a second substrate 2 with the electrode 12 and the ink supply port 17 are joined to each other, and then the jetting chamber 5 and the diaphragm 4 are formed by reducing a thickness of the first substrate 1 by wet etching. In the method, after the first substrate 1 and the second substrate 2 are joined to each other, an inside region of the ink supply port 17 is formed by an SiO<SB>2</SB>film or SiN film before the first substrate 1 is etched. COPYRIGHT: (C)2004,JPO
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