VALVELESS MICROPUMP

摘要

A valveless micropump (10) includes a hollow pump chamber (12) having a driving element (14) coupled thereto, an inlet channel (16) and an outlet channel (18) coupled to the hollow pump chamber (12) defining a fluid flow path through them. At least one direction-sensitive element (20) disposed in the flow path within one of the inlet and outlet channels (16, 18) is installed at angle which produces a drag ratio greater than unity on fluid in the flow path. The driving element (14) may comprise an electrostatic/piezoelectric membrane. Various embodiments of direction-sensitive element (20) include airfoil elements in inlet or outlet channels, or both, and one or more cascades of airfoil elements.