| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a fluid control device and method, capable of quantitatively discharging/supplying, at a high speed and with high precision regardless of an intermittent or a continuous manner, of various liquids such as adhesive, cream solder, phosphor, grease, paint, hot melt, chemicals, and foods, etc, used in commodities, such as products for commercial use, information apparatus, FA apparatus, displays or used in processes of producing electronic parts or household appliances. <P>SOLUTION: The fluid control device comprises a valve for opening/closing the inlet port side arranged in a fluid path which communicates an inlet port and an outlet port and a pump functioning for pumping fluid to the outlet port side. The valve and pump are driven respectively by an independent actuator. <P>COPYRIGHT: (C)2004,JPO</p> |
