METHOD AND DEVICE FOR PROCESSING BOARD AND PLATE MEMBER USED FOR THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a method of efficiently and uniformly forming irregularities on the surface of a board used for a solar cell.

SOLUTION: A board processing device is used for roughening the surface of the board 1 as an object of processing through a method wherein the surface of the board 1 is covered with a plate member 13 having a large number of openings and then subjected to dry etching. The opening rate of the openings 14 is set higher at the center part than at the peripheral part of the plate member 13 in a plan view.

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