| 摘要 |
PROBLEM TO BE SOLVED: To provide an improved probe device, and an electronic state measuring method and imaging method of material in nanometer scale. SOLUTION: This probe device has a cantilever 10 having a probe 10a arranged oppositely on the surface of a specimen 20; means 11, 31, 32, 40, 41, 42 and 43 for self-exciting and vibrating the cantilever at a prescribed frequency by feeding back the vibration amplitude value of the cantilever; a means 22 for applying a bias to the specimen or probe; and a means 44 for measuring the frequency shift resulted from a charge moving force acting between the cantilever and the specimen. COPYRIGHT: (C)2004,JPO |
