| 摘要 |
PROBLEM TO BE SOLVED: To observe axial-asymmetric aberration of a lens system at high sensitivity by a practical method. SOLUTION: This observation system is constituted of an inspected lens 4 for inspection, an illumination system 6 for emitting parallel light, a beam splitter 5, a spherical mirror 3 of a reflecting sample for the inspected lens 4, and a point image magnification observation system 7 for magnification-observing a point image generated by light reflected on the spherical mirror 3 and transmitted through the inspected lens 4. COPYRIGHT: (C)2004,JPO
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