| 摘要 |
PROBLEM TO BE SOLVED: To provide a small electrostatic actuator suitable for an optical switch, particularly a large-scale matrix optical switch. SOLUTION: The small electrostatic actuator comprises a fixed member 1, a driving member 2 and a rotary supporting member 3. The fixed member 1 has a fixed frame section 11 and a fixed electrode section 12 comprising a fixed comb-shaped electrode part 121 and a fixed comb-shaped connection part 122. The driving member 2 moved by electrostatic power against the fixed electrode section has a movable electrode section 21 comprising a movable comb-shaped electrode part 211 and a movable comb-shaped connection part 212 and being insulated electrically from the fixed electrode section, a working section 23 which moves for a distance longer than the stroke of the movable electrode section in conjunction with the move of the movable electrode section, and a displacement section 22 connecting the movable electrode section and the working section. The rotary supporting member 3 connects, with the fixed frame section, a portion nearer to the movable electrode section than the center position of a straight line linking the working section of the driving member to the movable electrode section, and supports the displacement section oscillating with the move of the movable electrode section. COPYRIGHT: (C)2004,JPO
|
