| 摘要 |
PROBLEM TO BE SOLVED: To provide a continuous vacuum treatment system in which the object to be treated can be introduced from the air into a vacuum chamber while satisfactorily holding a vacuum inside the vacuum chamber with the indraft of the air extremely reduced. SOLUTION: The continuous vacuum treatment system is provided with an oscillating member 12 having at least one chamber at a place thorough which the object 1 to be treated passes in the space between a vacuum chamber 11 and an air pressure atmosphere, and a seal part 9 comprising at least one of pusher 3, 4 for discharging the object charged to the chamber of the oscillating member therefrom. COPYRIGHT: (C)2004,JPO
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