| 摘要 |
PROBLEM TO BE SOLVED: To provide a novel aluminum nitride powder showing an excellent water resistance and fillability. SOLUTION: The powder comprises a composite particle made of an aluminum nitride particle whose surface is covered with a coating layer. Here, the powder has (1) the coating layer containing Si and O, (2) a specific surface are of≤10 m<SP>2</SP>/g and (3) an average particle size of 2-100μm. COPYRIGHT: (C)2004,JPO
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