| 摘要 |
A mechanical arm device for carrying and detecting a wafer comprises a seat and an arm mechanism coupled to seat and including an elbow, a forearm, and a sensor wherein elbow is controlled by seat, forearm is secured to one end of elbow and includes a front fork, and sensor is secured to a bottom of forearm at its free end, extended from fork, and electrically coupled to seat through a signal cord. In operation, the arm device carries wafer for feeding into a wafer container for measuring wafer by sensor in a non-contact manner. It ensures a highly correct horizontal level and height measuring of wafer.
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