A method for transferring a pattern from an elastic stamp to a substrate in the presence of a third medium is described. A proximity contact is achieved between the stamp and the substrate. A layer of the third medium between the stamp and the substrate is controlled to a predetermined thickness. Stamps for carrying out this method are also described.
申请公布号
WO2004022338(A2)
申请公布日期
2004.03.18
申请号
WO2003IB03834
申请日期
2003.08.28
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION;BIETSCH, ALEXANDER;DELAMARCHE, EMMANUEL;MICHEL, BRUNO;SCHMID, HEINZ;WOLF, HEIKO
