SEMICONDUCTOR DEVICE MANUFACTURING LINE

摘要

PURPOSE: To provide a semiconductor device manufacturing line which solves problems accompanyied by the conveyance or handling of a carrier containing a product wafer. CONSTITUTION: A product wafer having been treated by a semiconductor manufacturing apparatus 10b is carried to an inspecting device 59 and inspected, and the result is sent to a host computer. A product wafer decided as a defective by the inspection is replaced with an empty carrier by a built-in wafer replacing apparatus 41 as instructed by the host computer. The carrier containing the product wafer decided as the defective is regarded as a reproduction lot by the host computer. Reproduction is carried out by wafer manufacturing operation according to manufactureing-reference information for reproduction that the host computer has.