OPTICAL COMPONENT AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide optical components improved in adhesion properties and durability by forming an adhesion improving layer between a resin substrate and an inorganic film, such as an antireflection film.

SOLUTION: The method for manufacturing the optical components comprises forming a metalloid/semiconductor film 21 by a sputtering process on the resin substrate 1, then reforming the front surface side of the film 21 to an oxide film 22 in such a manner that the film 21 is made to remain on the resin substrate 1 by plasma oxidation, and forming an intermediate layer 2 consisting of the film 21 and the oxide film 22 of the metalloid/semiconductor film.

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