发明名称 |
PROCESS AND JIG FOR SUPPLYING CZOCHRALSKI RAW MATERIAL |
摘要 |
PROBLEM TO BE SOLVED: To statically charge an inexpensive solid raw material in a grain aggregate form having no risk of inducing cracking to a raw material melt without solidifying the surface of the raw material melt inside a crucible. SOLUTION: A tubular raw material vessel 10 is made of a non-meltable material which does not melt through its contact with the melt raw material 14 inside the crucible 3. The bottom of the raw material vessel 10 is blocked by a bottom cover 11 made of a meltable material which is melted and removed through its contact with the melt raw material 14 inside the crucible 3. The raw material vessel 10 is filled with the solid raw material 13 in the grain aggregate form and hung above the crucible 3 to dip its lower part in the melt raw material 14 inside the crucible 3. This melts and removes the bottom cover 11 through its contact with the melt raw material 14 inside the crucible and charges the solid raw material 13 inside the raw material vessel 10 to the melt raw material 14 inside the crucible 3. COPYRIGHT: (C)2004,JPO |
申请公布号 |
JP2004083322(A) |
申请公布日期 |
2004.03.18 |
申请号 |
JP20020245287 |
申请日期 |
2002.08.26 |
申请人 |
SUMITOMO MITSUBISHI SILICON CORP |
发明人 |
NAKAJIMA KATSUNORI;ITO MASATO |
分类号 |
C30B15/02;C30B29/06;(IPC1-7):C30B15/02 |
主分类号 |
C30B15/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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