GAS REACTOR, REACTION PIPE AND SAMPLE EVALUATION APPARATUS

摘要

PROBLEM TO BE SOLVED: To ensure required airtightness even if the clamping pressure of first and second pipe bodies constituting a heating oven is low. SOLUTION: The heating oven 12 in a gas reactor is constituted by joining a first pipe body 13 made of quartz glass and a second pipe body 14 made of a metal by interposing an expanded graphite packing 15 between both pipe bodies. The upper seal surface 13e of the first pipe body 13 is made flat while projections 14e are provided to the periphery of the lower seal surface 14c of the second pipe body 14 and the projections 14e are bored in the expanded graphite packing 15 to form a seal part. By the formed seal part, even if both pipe bodies are joined by the clamping pressure corresponding to the first pipe body 13 made of quartz glass, required airtightness is ensured and constant airtightness is kept without being affected by the surface roughness of the applied expanded graphite packing 15. COPYRIGHT: (C)2004,JPO