METHOD FOR FORMING HARD CARBON NITRIDE FILM

摘要

PROBLEM TO BE SOLVED: To provide a method for forming a hard carbon nitride film which makes the hardness of the film higher than the hardness of a DLC (Diamond-like Carbon) film and can make a deposition rate higher.

SOLUTION: The method for forming the hard carbon nitride film on the surface of a material to be treated comprises heating and sublimating raw material hydrocarbons by utilizing a hollow cathode discharge within a process chamber while introducing nitrogen gas into the process chamber and forming the hard carbon nitride film by vapor deposition on the surface of the material to be treated.

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