| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electronic device using linear carbon structures which are uniform in diameter and to provide its manufacturing method. <P>SOLUTION: The electronic device is composed of members 52 and 54 which are formed of metal silicide to serve as conductive members and the linear carbon structures 58 connected to the members 52 and 54. The method of manufacturing the electronic device comprises a first process of forming the metal silicide layers 52 and 54 as the conductive members and a second process of enabling the carbon linear structures 58 to grow from the metal silicide layers 52 and 54 by a CVD method. The metal silicide layers 52 and 54 are formed of silicide of Ni, Co, Fe or an alloy of them. It is preferable that carbon nano-tubes serve as the linear carbon structures 58. <P>COPYRIGHT: (C)2004,JPO</p> |
