| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning apparatus which prevents solvent from leaking and enhances the solvent recovery ratio. SOLUTION: The solvent reproduced by a cooler 5 is recovered and is returned to a cleaning vessel 3. A conical recovery means 6 preventing the vaporized solvent from diffusing is disposed between the cleaning vessels 2, 3 and the cooler 5. The recovery means 6 is provided with an opening part 8 allowing a work 7 to pass therethrough and immersing it in the cleaning vessels 2, 3 or make the work come close to the solvent in a vaporization vessel 4. A dropping preventing means 9 which prevents the solvent from dropping from the opening part 8 is preferably formed on the edge of the opening part 8 or on the outside thereof. COPYRIGHT: (C)2004,JPO
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