POWER CONNECTOR FOR HEATER BLOCK OF SEMICONDUCTOR FABRICATING EQUIPMENT

摘要

PURPOSE: A power connector for a heater block of semiconductor fabricating equipment is provided to extend the lifetime of a heater block and improve the operation rate of the equipment by solving a problem arising from a damaged heater block and by preventing a defect caused by arcing. CONSTITUTION: A post heater is mounted on a heater block through a screw(145) inserted into the heater block with a heat wire, having a head part(140) protruding to the outside of the heater block. A connector(150) of a pin type provides a power supply path to the heat wire, connected to the head part. A tightening pin(155) is inserted into the front portion of the connector to supply an additional connection path, opening the head part. A spring(157) in the connector pushes the tightening pin toward the front so as to be inserted into the head part when the head part and the connector are interconnected.