| 摘要 |
PROBLEM TO BE SOLVED: To improve the yield of a semiconductor device by building a production control system for the semiconductor device in consideration of time efficiency and reliability of a production process. SOLUTION: One or more manufacturing device is selected among a group of manufacturing devices, and the yield of each manufacturing device or a target lot in each device status (chamber, charge position, module, etc.) is estimated on the basis of an information including information on the device status of the respective selected devices. Then the respective manufacturing device or the respective device status is ranked in accordance with evaluation including the estimated value of the yield of the target lot, thus specifying a manufacturing device or device status for manufacturing the target lot. COPYRIGHT: (C)2004,JPO
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