BLUE LIGHT-EMITTING Si:SiO2 FILM, BLUE LIGHT-EMITTING ELEMENT HAVING THE SAME AND METHOD FOR PRODUCING BLUE LIGHT-EMITTING Si:SiO2 FILM

摘要

PROBLEM TO BE SOLVED: To provide a new light-emitting Si:SiO2film obtained by a very simple process without annealing treatment.

SOLUTION: The blue light-emitting film is formed on a substrate by using a target of Si and SiO2, and carrying out simultaneous sputtering of the Si and the SiO2while regulating the volume percentage of the Si in the SiO2based on the whole film so as to be 0.75-4.5% to form the blue light-mitting Si:SiO2film on a substrate.

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