摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a probe coupling substrate and its manufacturing method, capable of easily analyzing probes, as well as minimizing loss in sampling inspection, to enable quick and inexpensively detection and quantitative analysis of a target matter, when using various surface analyses, and to provide a method for quantitatively analyzing the target matter in a specimen quickly and inexpensively. <P>SOLUTION: The probe-coupling substrate and its manufacturing method are probes which are specifically combinable with the target matter located on the substrate surface of at least insulative face, and a conductive membrane is located on at least the same level as the probe. This method is for analyzing probe arrays having those probes specifically combined with the target matter which may be contained in the measuring specimen, as a plurality of mutually-independent spots on the substrate. In the method, the probes are analyzed, after the conductive membrane is located on the substrate surface to be electrically connected with a ground. <P>COPYRIGHT: (C)2004,JPO</p> |