| 摘要 |
PROBLEM TO BE SOLVED: To provide a method to coat a surface of an MEMS device with a silane coupling agent for reducing automatic adhesion. SOLUTION: In this method, (a) the silane coupling agent is mixed with a low volatile matrix material in a raw film material vessel, (b) a micro-electromechanical system device is disposed in a vacuum vapor deposition chamber connected to the raw film material vessel, and (c) the vacuum vapor deposition chamber is evacuated to the predetermined pressure, and the pressure in the vacuum vapor deposition chamber is maintained for a predetermined time in order to perform chemical vapor deposition of the silane coupling agent on a surface of the micro-electromechanical system device. COPYRIGHT: (C)2004,JPO |
