MANUFACTURING METHOD OF LIQUID CRYSTAL DISPLAY

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a liquid crystal display having a polysilicon semiconductor layer whose surface roughness is reduced. SOLUTION: This manufacturing method of a liquid crystal display includes a step to provide a substrate, a step to form an insulating body layer on the substrate, a step to deposit an amorphous silicon layer on the insulating body layer and a step to reduce the surface roughness of the crystalized silicon layer by crystalizing the amorphous silicon layer under oxygen atmosphere. COPYRIGHT: (C)2004,JPO