| 摘要 |
PROBLEM TO BE SOLVED: To provide an echelle diffraction grating excellent in the accuracy of a blaze angle and the smoothness of the wall surface of a groove, and to provide its manufacturing method. SOLUTION: In the echelle diffraction grating, many V-shaped grooves 31 are respectively formed in parallel on the surface of an Si <100> substrate 30. As for the diffraction grating, the wall surface 32 of the groove 31 on which light is made incident is the surface (111) of an Si crystal, and a reflection film 34 is formed on the wall surface 32. Then, the blaze angleθ<SB>B</SB>of the groove 31 of the diffraction grating is equivalent to an angle formed by the surface (111) and the surface (100) of the Si crystal and is set to 54.7°. COPYRIGHT: (C)2004,JPO
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