发明名称 Graded GexSe100-x concentration in PCRAM
摘要 The present invention provides a design for a PCRAM element which incorporates multiple metal-containing germanium-selenide glass layers of diverse stoichiometries. The present invention also provides a method of fabricating the disclosed PCRAM structure.
申请公布号 US2004053461(A1) 申请公布日期 2004.03.18
申请号 US20020230327 申请日期 2002.08.29
申请人 MOORE JOHN T.;GILTON TERRY L.;CAMPBELL KRISTY A. 发明人 MOORE JOHN T.;GILTON TERRY L.;CAMPBELL KRISTY A.
分类号 H01L21/8234;H01L27/24;H01L45/00;(IPC1-7):H01L21/823 主分类号 H01L21/8234
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