| 发明名称 |
Method and apparatus of carbon nanotube fabrication |
| 摘要 |
A method of fabricating carbon nanotubes in a nanotube growth apparatus including executing a nanotube growth process recipe and monitoring a safety condition during the executing step. The executing step is interlocked to the monitoring step such that the executing step can be aborted based on the output of the monitoring step.
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| 申请公布号 |
US2004053440(A1) |
申请公布日期 |
2004.03.18 |
| 申请号 |
US20030402455 |
申请日期 |
2003.03.28 |
| 申请人 |
FIRST NANO, INC. |
发明人 |
LAI JONATHAN W.;ADDERTON DENNIS M.;MINNE STEPHEN C. |
| 分类号 |
D01F9/127;(IPC1-7):H01L21/00;C30B1/00;C23C16/00 |
主分类号 |
D01F9/127 |
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