发明名称 ELECTROLESS PLATING METHOD AND OPTICAL PROBE
摘要 PROBLEM TO BE SOLVED: To provide an optical probe which makes the selectivity of size-dependent electroless plating controllable within a region from submicron to nanometer order to easily form an opening of an opening diameter below 100 nm at the front end of an acute section. SOLUTION: The method has pretreating steps B and C of sticking a tin (Sn) compound to the surface of an acuminated fiber 20A and further of depositing palladium (Pd) nuclei and a plating step D of immersing the acuminated fiber 20C subjected to the pretreating steps into an electroless plating solution 53 and of subjecting the fiber to the electroless plating. In the plating step D, the electroless plating is performed while controlling the hydrogen molecule distribution on the surface of the acuminated fiber 20A by immersing the acuminated fiber 20C into the electroless plating solution 53, then stirring the solution 53 by ultrasonic irradiation using an ultrasonic vibration plate 51. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004084013(A) 申请公布日期 2004.03.18
申请号 JP20020247395 申请日期 2002.08.27
申请人 JAPAN SCIENCE & TECHNOLOGY CORP;KANAGAWA ACAD OF SCI & TECHNOL 发明人 MONOBE HIDEJI
分类号 G02B6/02;C23C18/16;C23C18/31;G02B6/10;(IPC1-7):C23C18/16 主分类号 G02B6/02
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