| 摘要 |
PROBLEM TO BE SOLVED: To provide a contact resistance measuring method of a probe and a test method of a semiconductor device capable of preventing decline of test efficiency, and measuring accurately a contact resistance value. SOLUTION: A probe card 18 is equipped with a relay 38 for connecting a probe 16A to a voltage source of a tester 14 at the wafer 12 testing time, and grounding the probe 16A at the contact resistance measuring time of the probe. The tester 14 has a function as a current source 46 and a voltmeter 48, and supplies a current to probes 16B, 16C and measures a voltage at the contact resistance measuring time. The whole contact resistance value of the probes 16A-16C is determined from the measured value and a current value of the supplied current. When the determined contact resistance value becomes over a prescribed value incapable of an accurate wafer 12 test, the probes 16A-16C are cleaned. COPYRIGHT: (C)2004,JPO
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