| 摘要 |
PROBLEM TO BE SOLVED: To more uniformly electrolyze the whole surface of a substrate so as to give an enhanced uniformity within the face, even when a size of the substrate is enlarged and the film thickness of a feed layer becomes thin. SOLUTION: In an electrolytic treatment apparatus for electrolyzing the substrate W which is held by a substrate holder 10 and is made to be either one electrode of a cathode or an anode by coming in contact with a feeding contact 18, after filling an electrolytic liquid Q between the substrate W and a counter electrode 22 placed in a position facing with the substrate W, this electrolytic treatment apparatus comprises an electric-field-correcting body 32 which is arranged between the counter electrode 22 and the substrate W held by the substrate holder 10, and has an approximately same effective region as an effective area of the substrate W, and a moving mechanism for moving the substrate holder 10 and the counter electrode 22 relatively in parallel. COPYRIGHT: (C)2004,JPO
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